Reliability testing method and apparatus

ABSTRACT

A chip reliability testing method includes mounting a first test chip on a test board, wherein the first test chip comprises a silicon device having a plurality of metallization layers configured to establish a plurality of test circuits, a conductive redistribution layer contacting at least one of the plurality of metallization layers, and contact pads on exposed portions of the conductive redistribution layer. The mounting includes bonding the contact pads of the first test chip to corresponding contact pads of the test board. The method further includes applying a test voltage to a first contact pad connected to a first test circuit of the plurality of test circuits and, while maintaining the test voltage, subjecting the first test circuit to a reliability test. The method further includes monitoring an output voltage at a second contact pad connected to the first test circuit during a test period during the reliability test.

PRIORITY CLAIM

The present application is a continuation of U.S. application Ser. No.15/362,075, filed on Nov. 28, 2016, which is a divisional of U.S.application Ser. No. 13/411,193, filed Mar. 2, 2012, the content ofwhich are incorporated herein by reference in their entireties.

BACKGROUND

Portable or handheld electronic devices, e.g., calculators, cameras,cell phones, other mobile devices, etc., are prone to fail due toimpacts as a result of dropping. Several tests have been developed tocheck the reliability of integrated circuits (ICs) or chips for portableor handheld electronic devices under simulated dropping conditions.

BRIEF DESCRIPTION OF THE DRAWINGS

One or more embodiments are illustrated by way of example, and not bylimitation, in the figures of the accompanying drawings, whereinelements having the same reference numeral designations represent likeelements throughout. The drawings are not to scale, unless otherwisedisclosed.

FIG. 1 is a schematic diagram of a drop reliability testing system inaccordance with some embodiments.

FIG. 2 is a schematic cross-section view of a test chip in accordancewith some embodiments.

FIGS. 3A-3B, 4A-4B and 5 are schematic block diagrams of various testboard configurations in accordance with some embodiments.

FIG. 6 is a flow chart of a method in accordance with some embodiments.

DETAILED DESCRIPTION

It is to be understood that the following disclosure provides manydifferent embodiments or examples, for implementing different featuresof various embodiments. Specific examples of components and arrangementsare described below to simplify the present disclosure. The inventiveconcept may, however, be embodied in many different forms and should notbe construed as being limited to the embodiments set forth herein;rather, these embodiments are provided so that this description will bethorough and complete, and will fully convey the inventive concept tothose of ordinary skill in the art. It will be apparent, however, thatone or more embodiments may be practiced without these specific details.

In the drawings, the thickness and width of layers and regions areexaggerated for clarity. Like reference numerals in the drawings denotelike elements. The elements and regions illustrated in the figures areschematic in nature, and thus relative sizes or intervals illustrated inthe figures are not intended to limit the scope of the inventiveconcept.

FIG. 1 is a schematic diagram of a drop reliability testing system 100,in accordance with some embodiments. The testing system 100 includes aframe 110, a drop table 120 and a test controller 130. A test specimen140 is mounted on the drop table 120. For example, the test specimen 140includes a board, e.g., a printed circuit board (PCB), 143 on which oneor more chips 145 are mounted. In a drop test, the drop table 120 israised to a predetermined height along the frame 110 and is thendropped, e.g., permitted to free fall under gravity, until the droptable 120 hits a stopping element 150 at the bottom of the frame 110.The test controller 130 is electrically connected to various sensingdevices arranged on the frame 110 and/or the drop table 120 to measureand report an acceleration/deceleration profile of the drop test, suchas peak and duration of acceleration/deceleration of the drop table, aswell as variations of electrical parameters of the test specimen 140before, during and/or after the drop test.

A standard for performing drop tests is Joint Electron DevicesEngineering Council (JEDEC) STANDARD (JESD22-B111 & JESD22-B110A). UnderJEDEC standards, the peak deceleration of the drop table is between2900G & 100G, the deceleration duration is between 0.3-2 milliseconds(ms), and the deceleration profile is a half sine. During the drop test,data regarding change in resistance of the test specimen 140, especiallythe chips 145, is acquired by an in-situ event detector which issoldered to the test specimen 140. A failure is reported if the eventdetector indicates that the resistance exceeds 1000 Ohm for apredetermined period, e.g., from 0.1 to 1 microseconds (μs).

Recently, ICs for portable or handheld electronic devices, e.g.,calculators, cameras, cell phones, personal digital assistants (PDAs),tablet/notebook/laptop computers, electronic reading devices, navigationdevices, etc. become smaller and lighter, yet packed with morefunctionality. This tendency is met by, among other things, using low-kdielectric materials having dielectric constants (k) between 2.5 and 3.0and extra low-k (ELK) dielectric materials having dielectric constantsbelow 2.5 in metallization layers of such ICs. Such low-k or ELKmaterials improve the electrical performance of the metallization layersand, hence, increase the overall performance of the chip. However, low-kor ELK materials are more fragile than other dielectric materials andtend to crack or delaminate under stress and/or strain. To ensurereliability of ICs with low-k or ELK materials, the reliability of boththe top level of interconnection (e.g., solder bumps, contact pads,conductive redistribution layers) and the lower level ofinterconnection, i.e., in metallization layers, is checked.

FIG. 2 is a schematic cross-section view of a test chip 200 inaccordance with some embodiments. In some embodiments, the test chip 200is mounted on a PCB and tested for reliability, similar to the testingof chips 145 described with respect to FIG. 1. The test chip 200includes a silicon device (hereinafter “Si device”) 271, a plurality ofmetallization layers 272 formed over the Si device 271, a conductiveredistribution layer 273 formed over the metallization layers 272, andcontact pads 260 formed over the conductive redistribution layer 273.The contact pads 260 are physically bonded to a PCB 243 by way of solderbumps 275. The PCB 243 and one or more test chips 200 thereon togetherdefine a test board. In some embodiments, the conductive redistributionlayer 273 is replaced by a conductive substrate which has a first sideconnected to the metallization layers 272, and a second, opposite sideconnected to the contact pads 260. In one or more embodiments, theconductive substrate is a laminate substrate. In the description hereinbelow, embodiments in which element 273 is a conductive redistributionlayer are described in details. A similar description is applicable toembodiments in which element 273 is a conductive substrate.

The Si device 271 is a semiconductor device which includes, but is notlimited to, bulk silicon, a semiconductor wafer, a silicon-on-insulator(SOI), a wafer-on-package a package-on-package, etc. Other semiconductormaterials including group III, group IV, and group V elements are usedin some embodiments.

In some embodiments, the Si device 271 includes no active devices formedtherein or thereon. Examples of “active devices” include transistors(e.g., metal oxide semiconductor field effect transistors (MOSFET),complementary metal oxide semiconductor (CMOS) transistors, bipolarjunction transistors (BJT), high voltage transistors, high frequencytransistors, p-channel and/or n-channel field effect transistors(PFETs/NFETs), etc.). Further examples of “active devices” includeintegrated circuits, such as logic devices, memory devices, RF devices,etc.

The metallization layers 272 include multiple dielectric and conductivelayers arranged in an alternating manner. In FIG. 2, the conductivelayers of the metallization layers 272 are indicated as M1, M2, M3, M4,M5, M6 and M7. The dielectric layers of the metallization layers 272 areeach disposed between two adjacent conductive layers M1, M2, M3, M4, M5,M6 and M7. The dielectric layers are not indicated in FIG. 2 forsimplicity. In some embodiments, the metallization layers 272 includeother than seven conductive layers. In a fully functional chip, themetallization layers are arranged to connect various active devicesformed in/on the Si device 271 with each other and with externalcircuitry via the conductive redistribution layer 273, the contact pads260 and the solder bumps. In the test chip 200, the metallization layers272 do not necessarily connect any active devices in the Si device 271with each other or with external circuitry. To simulate theinterconnections of the fully functional chip, in some embodiments, themetallization layers 272 include the same number of dielectric andconductive layers as the metallization layers for a fully functionalchip. Each individual layer also has the same thickness. If themetallization layers 272 of the test chip 200 fail a reliability test,the metallization layers of the fully functional chip are likely to failthe test, which prompts a redesign of the fully functional chip.

The dielectric layers in the metallization layers 272 include low-kand/or ELK dielectric materials, un-doped silicate glass (USG), siliconnitride, silicon oxynitride. The low-k dielectric materials, andespecially ELK dielectric materials, are more fragile than the othermaterials and are subject to cracking and/or delamination. Theconductive layers in the metallization layers 272 include, in someembodiments, copper or copper alloys.

In some embodiments, a passivation layer is formed on the metallizationlayers 272 and patterned to form an opening exposing a contact region ofthe top metallization layer. In one embodiment, the passivation layer isformed of a non-organic material selected from un-doped silicate glass(USG), silicon nitride, silicon oxynitride, silicon oxide, andcombinations thereof. In another embodiment, the passivation layer isformed of a polymer layer, such as an epoxy, polyimide, benzocyclobutene(BCB), polybenzoxazole (PBO), and the like. Other relatively soft, oftenorganic, dielectric materials are also usable.

A post passivation interconnect (PPI) line is formed on the passivationlayer to define the conductive redistribution layer 273. Using a maskand a photolithography process, a conductive material is filled in theopening of the passivation layer and an opening of the mask, followed byremoving the mask and any unwanted exposed conductive portions. Theremoval includes a wet etching process or a dry etching process. In oneembodiment, the removal includes an isotropic wet etching process usingan ammonia-based acid, which, in some embodiments, is a flash etchingwith a short duration.

The conductive redistribution layer 273 includes, but is not limited tocopper, aluminum, copper alloy, a nickel-containing layer, otherconductive materials, etc. The PPI formation methods include plating,electroless plating, sputtering, chemical vapor deposition methods, andthe like. The conductive redistribution layer 273 connects the contactregion of the metallization layers 272 to bump features where thecontact pads 260 are to be formed.

In some embodiments, a dielectric layer, also referred to as anisolation layer or a second passivation layer, is formed on the exposedpassivation layer and the conductive redistribution layer 273. Thedielectric layer is formed of dielectric materials such as siliconnitride, silicon carbide, silicon oxynitride or other applicablematerials. The formation methods include plasma enhance chemical vapordeposition (PECVD) or other commonly used CVD methods.

In some embodiments, a polymer layer is formed on the dielectric layer.Lithography technology and etching processes such as a dry etch and/or awet etch process, are then performed to pattern the polymer layer. Anopening is thus formed through the polymer layer and the secondpassivation layer to expose a portion of the conductive redistributionlayer 273 for allowing a subsequent bump process. The polymer layer isformed of a polymer, such as an epoxy, polyimide, benzocyclobutene(BCB), polybenzoxazole (PBO), and the like. Other relatively soft, oftenorganic, dielectric materials can also be used. In one embodiment, thepolymer layer is a polyimide layer. In another embodiment, the polymerlayer is a polybenzoxazole (PBO) layer. The polymer layer has thefunction of reducing inherent stresses on a corresponding substrate. Inaddition, the polymer layer is formed to a thickness of tens of microns.

The contact pads 260 are formed in the opening of the polymer layer andthe second passivation layer. In some embodiments, the contact pad 260includes, but is not limited to, aluminum, copper or an aluminum/copperalloy.

An under-bump-metallurgy (UBM) layer that includes, in some embodiments,a diffusion barrier layer and a seed layer, is formed on the contactpads 260. The diffusion bather layer, also referred to as an adhesionlayer, in some embodiments, is formed of tantalum nitride, titaniumnitride, tantalum, titanium, or the like. The formation methods includephysical vapor deposition (PVD) or sputtering. The seed layer, in someembodiments, is a copper seed layer formed on the diffusion barrierlayer. The seed layer, in some other embodiments, is formed of copperalloys that include silver, chromium, nickel, tin, gold, andcombinations thereof. In one embodiment, the UBM layer includes adiffusion barrier layer formed of Ti and a seed layer formed of Cu.

A conductive material with solder wettability, such as SnAgCu, or otherlead-free or lead-containing solder materials, is deposited on the UBMlayer, thereby forming a bump (or solder bump) 275 in contact with thecontact pads 260.

At least one test circuit is formed for the test chip 200. The testcircuit is a daisy chain that serially connects one of the solder bumps275 to one or more other solder bumps 275. For example, the test circuit265 serially connects a solder bump 275A, to a solder bump 275B, andthen to a further solder bump 275C. The solder bumps 275A, 275B, 275C inthe test circuit 265 are serially connected by the corresponding contactpads 260A, 260B, 260C, the conductive redistribution layer 273, andconductive vias 276 formed between multiple layers of the metallizationlayers 272. A few, not all, conductive vias 276 are indicated in FIG. 2for simplicity. The top ends closer to the contact pads 260 of theconductive vias 276 are connected with each other by the conductiveredistribution layer 273 and/or by a conductive layer M2, M3 . . . or M7in the metallization layers 272. The lower ends (i.e., the ends fartherfrom the contact pads 260 than the top ends) of the conductive vias 276are connected with each other by a conductive layer in the metallizationlayers 272, for example, by the bottom conductive layer M1 asillustrated in FIG. 2. As a result, the conductive vias 276 areconnected by the corresponding conductive layers in the metallizationlayers 272 and by the conductive redistribution layer 273. Consequently,the test circuit 265 is defined as a continuous chain from one contactpad 260 to another contact pad 260, such as from contact pad 260A tocontact pad 260C. The contact pad 260A at the beginning of the chain isconnected to a corresponding input terminal of the PCB 243 in a mannerdescribed below. The contact pad 260C at the end of the chain isconnected to a corresponding output terminal of the PCB 243 in a mannerdescribed below.

The test circuit 265 extends through at least two layers of themetallization layers 272. In some embodiments, the test circuit 265extends through all layers of the metallization layers 272. In one ormore embodiments, such a test circuit 265 is formed by including asingle conductive via 276 that extends through all dielectric layers ofthe metallization layers 272, from the top conductive layer to thebottom conductive layer. Alternatively or additionally, the test circuit265 that extends through all layers of the metallization layers 272 isformed by including several serially connected conductive vias 276 eachof which extends through one or more dielectric layers of themetallization layers 272 and which together extend through alldielectric layers of the metallization layers 272. For example, a firstconductive via extends through several dielectric layers between theconductive layer M7 and M4, and a second conductive via extends throughseveral dielectric layers between the conductive layer M4 and M1. Thefirst and second conductive vias are serially connected with each otherby the conductive layer M4. Each of the first and second conductive viasindividually does not extend through all dielectric layers of themetallization layers 272. However, together, the serially connectedfirst and second conductive vias extend through all dielectric layers ofthe metallization layers 272.

Because the test circuit 265 extends through multiple layers of themetallization layers 272, delamination or cracking in one or more of thelow-k or ELK dielectric materials and/or other defects are observableduring a reliability test, such as a drop test. Where the test circuit265 extends through all layers of the metallization layers 272,delamination or cracking in all low-k or ELK dielectric materials and/orother defects are observable during a reliability test, such as a droptest.

In some embodiments, potential delamination or cracking in all low-k orELK dielectric materials and/or other defects are monitored in areliability test, such as a drop test, by monitoring a real time changein the resistance of the test circuit 265 during the test. In someembodiments, a real time change in the resistance of the test circuitoccurs over a very short period of time such as 0.1-1 μs. The resistanceof the test circuit 265 indicates its electrical continuity throughmultiple layers of the test chip 200. If, due to the mechanical shockload caused by the drop test, the continuity is broken, the resistanceof the test circuit 265 momentarily increases, and such a short spike ofresistance is registered by the event detector described with respect toFIG. 1. For example, if, due to the mechanical shock load caused by thedrop test, an open circuit occurs even for a very short period of 0.1-1μs, the resistance of the test circuit 265 momentarily increases toabove 1000 Ohm, and such a short spike of resistance is registered bythe event detector described with respect to FIG. 1. The registeredshort spike of resistance indicates that the connections, bothmechanical and electrical, among the layers of the test circuit 200 faildue to mechanical shock loads.

In some situations, interconnects in a chip are connected together in asingle test circuit, and the resistance of such long chain ofinterconnects is beyond a range defined by the JEDEC standard. Forexample, the resistance reaches 20,000 to 30,000 Ohms. To ensure theaccuracy of reliability tests, each chip is provided with several testcircuits, in some embodiments.

FIG. 3A is a schematic diagram of a test board 300A in accordance withsome embodiments. The test board 300A includes a PCB which has thereonor therein a plurality of chip mounting areas 381-385 each for mountingtherein a test chip IC1-IC5, a plurality of input terminals designatedas IN, and a plurality of output terminals designated as OUT. The testboard 300A corresponds to the PCB 243 disclosed with respect to FIG. 2,and each test chip IC1-IC5 corresponds to the test chip 200 describedwith respect to FIG. 2.

The test board 300A further includes a plurality of input conductivepatterns each having opposite first and second ends. The first end isconnected to one of the input terminals, and the second end is locatedin a corresponding chip mounting area. For example, in a set of sixinput conductive patterns designated as 381IN, each input conductivepattern 381IN includes a first end and a second end. The first end iselectrically connected to a corresponding one of the input IN pins 1-6.The second end is located in the chip mounting area 381 for the testchip IC1. For illustration, the second ends of the input conductivepatterns 381IN are designated as 381 i. A similar set-up is alsoapplicable to other sets of each of six input conductive patterns 382IN,383IN, 384IN, and 385IN. Each input conductive pattern 382IN, 383IN,384IN, or 385IN includes a first end electrically connected to acorresponding one of the IN pins 7-12, one of the IN pins 13-18, one ofthe IN pins 19-24, or one of the IN pins 25-30. Each input conductivepattern 382IN, 383IN, 384IN, or 385IN further includes a second endlocated in the corresponding chip mounting area 382, 383, 384, or 385for the corresponding test chip IC2, IC3, IC4, or IC5. For illustration,the second ends of the input conductive patterns 385IN are designated as385 i in FIG. 3A.

The test board 300A further includes a plurality of output conductivepatterns each having opposite first and second ends. The first end isconnected to one of the output terminals, and the second end is locatedin a corresponding chip mounting area. For example, in a set of sixoutput conductive patterns designated as 381OUT, each output conductivepattern 381OUT includes a first end and a second end. The first end iselectrically connected to a corresponding one of the output OUT pins1-6. The second end is located in the chip mounting area 381 for thetest chip IC1. For illustration, the second ends of the outputconductive patterns 381OUT are designated as 381 o. A similar set-up isalso applicable to other sets each of six output conductive patterns382OUT, 383OUT, 384OUT, and 385OUT. Each output conductive pattern382OUT, 383OUT, 384OUT, or 385OUT includes a first end electricallyconnected to a corresponding one of the OUT pins 7-12, one of the OUTpins 13-18, one of the OUT pins 19-24, or one of the OUT pins 25-30.Each output conductive pattern 382OUT, 383OUT, 384OUT, or 385OUT furtherincludes a second end located in the corresponding chip mounting area382, 383, 384, or 385 for the corresponding test chip IC2, IC3, IC4, orIC5. For illustration, the second ends of the output conductive patterns385OUT are designated as 385 o in FIG. 3A.

Each of the chip mounting areas includes the second ends of multipleinput conductive patterns and the second ends of multiple outputconductive patterns for connecting multiple test circuits of thecorresponding test chip to the corresponding input and output terminals.For example, the chip mounting area 381 includes the second ends 381 iof multiple input conductive patterns 381IN, and the second ends 3810 ofmultiple output conductive patterns 381OUT for connecting multiple testcircuits of the corresponding test chip IC1 to the corresponding IN pins1-6 and OUT pins 1-6. For simplicity, the multiple test circuits of thetest chips IC1-IC5 are schematically illustrated in FIG. 3A and are notnumbered. In the test board 300A, each of the input terminals iselectrically connected via the corresponding input conductive pattern toone of the chip mounting areas. Likewise, each of the output terminalsis electrically connected via the corresponding output conductivepattern to one of the chip mounting areas. For example, the IN pin 1 iselectrically connected via the corresponding input conductive pattern381IN to the chip mounting area 381, and OUT pin 1 is electricallyconnected via the corresponding output conductive pattern 381OUT to thechip mounting area 381.

Each test chip IC1-IC5 is configured similarly to the test chip 200described with respect to FIG. 2. Each test chip includes multiple testcircuits. In some embodiments, at least one of the multiple testcircuits of the test chip is defined at least by at least two contactpads 260 (FIG. 2) and the conductive redistribution layer 273 (FIG. 2)which is patterned to serially connect the at least two contact pads 260into a daisy chain. In this manner, the test circuit is at leastconfigured for monitoring the reliability of the upper level ofinterconnects, i.e., the bumps 275 (FIG. 2), the contact pads 260 andthe conductive redistribution layer 273. In some embodiments, at leastone of the multiple test circuits of the test chip further extends tothe lower level of interconnects, i.e., the metallization layers 272. Inthis manner, the test circuit is configured, as described with respectto FIG. 2, for also monitoring the reliability of the metallizationlayers 272, especially the ELK dielectric material layers in themetallization layers 272.

Each test circuit of each test chip has one end connected to thecorresponding second end of one input conductive pattern, and anopposite end connected to the corresponding second end of one outputconductive pattern. For example, each test circuit of each test chip hasone end connected by the bumps 275 to the corresponding second end 381 iof the input conductive pattern 381IN, and an opposite end connected tothe corresponding second end 381 o of the output conductive pattern381OUT. As a result, each test circuit is connected to the correspondinginput and output terminals for further connection to testing equipment,e.g., an event detector. The length and/or the numbers of contact padsand/or layers for each test circuit are selected to meet therequirements of a specific test and/or specific testing equipment. Forexample, for a drop test using an event detector having a thresholdresistance of 1000 Ohm, each test circuit is configured to have anappropriate resistance within the capability of the testing equipmentthat is not greater than 1000 Ohm, to ensure accurate test results.

In the illustrated embodiment in FIG. 3A, there are six second ends ofthe input conductive patterns and six second ends of the outputconductive patterns in each chip mounting area, corresponding to sixinput conductive patterns and six output conductive patterns leadinginto each chip mounting area. However, any number of input and/or outputconductive patterns leading to each chip mounting area, as well as anynumber of chip mounting areas and/or any number of test chips mounted onthe test board 300A are implemented in various embodiments. In someembodiments, at least one chip mounting area has more input and/oroutput conductive patterns leading thereto than at least one other chipmounting area. The physical positions of the chip mounting areas and/orinput terminals and/or output terminals are variable as well.

FIG. 3B is a schematic diagram of a test board 300B in accordance withsome embodiments. The test board 300B has an electrical arrangementsimilar to that of the test board 300A. For simplicity, the electricalconnections to/from the chip mounting areas 382-384 are omitted in FIG.3B. The omitted electrical connections are similar to the electricalconnections to/from the chip mounting areas 381 and 385 in FIG. 3A.

The test board 300B has, however, a different physical arrangement fromthe test board 300A. For example, the input terminals of the test board300B are grouped into two input areas IN1, and IN2. Likewise, the outputterminals of the test board 300B are grouped into two output areas OUT1,and OUT2. Each of the input areas IN1 and IN2 has a corresponding set ofthree input conductive patterns, designated as 391A and 391B, leading toeach chip mounting area 381. The input conductive patterns 391A and 391Btogether perform the function of the input conductive pattern 381IN ofthe test board 300A. Likewise, each of the output areas OUT1 and OUT2has a corresponding set of three output conductive patterns, designatedas 391C and 391D, leading to each chip mounting area 381. The outputconductive patterns 391C and 391D together perform the function of theoutput conductive pattern 381OUT of the test board 300A. The chipmounting areas 381-385 are distributed at different physical locationson the test board 300B to determine the location that is most or leastlikely to fail to be made with a minimal number of tests. The test board300B further includes mounting fixtures, e.g., holes 346, for fixing thetest board 300B to testing equipment, e.g., a drop table. Forsimplicity, one hole 346 is labeled.

The test board 300B is in a state with no chip mounted in thecorresponding chip mounting areas 381-385. The test board 300B, in someembodiments, is provided as a universal test board which gives the userthe flexibility of selecting a desired test chip to be mounted on thetest board 300B. In some embodiments, identical test chips are mountedin some or all chip mounting areas 381-385 for simultaneously testingthe multiple test chips. In further embodiments, different test chipsare mounted in different chip mounting areas 381-385. In one or moreembodiments, one or more chip mounting areas is/are left empty without atest chip mounted thereon.

FIG. 4A is a schematic diagram of a test board 400A in accordance withsome embodiments. The test board 400A includes a PCB which has thereonor therein a plurality of chip mounting areas 481-385, a plurality ofinput terminals designated as IN and a plurality of output terminalsdesignated as OUT. Each mounting area 481-485 is for mounting therein atest chip. For simplicity, only IC1 is indicated in the chip mountingarea 481. The test board 400A corresponds to the PCB 243 disclosed withrespect to FIG. 2, and the test chip IC1 corresponds to the test chip200 described with respect to FIG. 2.

At least one of the input terminals is connected to multiple chipmounting areas. Likewise, at least one of the output terminals isconnected to multiple chip mounting areas. For example, each of theinput terminals IN pins 1-32 and the output terminals OUT pins 1-32 isconnected to all chip mounting areas 481-485.

In some embodiments, each input conductive pattern includes a first endelectrically connected to a corresponding one of the input terminals IN,and a second end located in the corresponding chip mounting area. Forexample, in a set of 32 input conductive patterns, designated as 481IN,each input conductive pattern 481IN includes a first end electricallyconnected to a corresponding one of IN pins 1-32, and a second endlocated in the chip mounting area 481 for the test chip IC1. The secondends of the input conductive patterns 481IN are designated as 481 i. Asimilar set-up is also applicable to other sets each of 32 inputconductive patterns 482IN, 483IN, 484IN, and 485IN. Each inputconductive pattern 482IN, 483IN, 484IN, or 485IN includes a first endelectrically connected to a corresponding one of IN pins 1-32. Eachinput conductive pattern 482IN, 483IN, 484IN, or 485IN further includesa second end located in the corresponding chip mounting area 482, 483,484, or 485. For illustration, the second ends of the input conductivepatterns 485IN are designated, as 485 i, in FIG. 4A.

In some embodiments, each output conductive pattern includes a first endelectrically connected to a corresponding one of the output terminalsOUT, and a second end located in the corresponding chip mounting area.For example, in a set of 32 output conductive patterns, designated as481OUT, each output conductive pattern 481OUT includes a first endelectrically connected to a corresponding one of OUT pins 1-32, and asecond end located in the chip mounting area 481 for the test chip IC1.The second ends of the output conductive patterns 481OUT are designatedas 481 o. A similar set-up is also applicable to other sets each of 32output conductive patterns 482OUT, 483OUT, 484OUT, and 485OUT. Eachoutput conductive pattern 482OUT, 483OUT, 484OUT, or 485OUT includes afirst end electrically connected to a corresponding one of OUT pins1-32. Each output conductive pattern 482OUT, 483OUT, 484OUT, or 485OUTfurther includes a second end located in the corresponding chip mountingarea 482, 483, 484, or 485. For simplicity, the second ends of theoutput conductive patterns 485OUT are designated, as 485 o, in FIG. 4A.

In some embodiments, each of the chip mounting areas includes the secondends of multiple input conductive patterns, and the second ends ofmultiple output conductive patterns for connecting multiple testcircuits of the corresponding test chip to the corresponding input andoutput terminals. For example, the chip mounting area 481 includes thesecond ends 481 i of multiple input conductive patterns 481IN, and thesecond ends 481 o of multiple output conductive patterns 481OUT, forconnecting multiple test circuits of the corresponding test chip IC1 tothe corresponding IN pins 1-32 and OUT pins 1-32. For simplicity, themultiple test circuits of the test chip IC1 are schematicallyillustrated in FIG. 4B and are not numbered.

The test chip IC1 is configured similarly to the test chip 200 describedwith respect to FIG. 2 and as described with respect to FIG. 3A. Thetest board 400A is illustrated as including one test chip, i.e., thetest chip IC1, mounted in the corresponding chip mounting area 481thereof. The other chip mounting areas 482-485 are left empty, asillustrated by the dot-dot lines inside each of the chip mounting areas482-485 in FIG. 4A.

In some embodiments, the test chip IC1 has a sufficient number of testcircuits to use all available input and output terminals of the testboard 400A. For example, where the test board 400A provides 32 availablepairs of input and output terminals and the test chip IC1 has 32 or moretest circuits, up to 32 available pairs of input and output terminalsprovided by the test board 400A are usable to test up to 32 testcircuits of the test chip IC1. In this case, ne test chip, i.e., IC1, ismounted on the test board 400A and tested at a time. To test chipreliability at different physical locations of the other chip mountingareas 482-485, multiple tests are performed, again with one test chip ata time.

In some embodiments, not all available input and output terminals of thetest board 400A are used for testing the test chip IC1, e.g., due to aninsufficient number of test circuits in the test chip IC1 and/or due totest requirements. For example, where the test board 400A provides 32available pairs of input and output terminals and 17 test circuits areprovided (or to be tested) in the test chip IC1, up to 17 availablepairs of input and output terminals provided by the test board 400A areusable to test up to 17 test circuits of the test chip IC1. If all 17test circuits are to be tested, one test chip, i.e., IC1, is mounted onthe test board 400A and tested at a time. To test chip reliability atdifferent physical locations of the other chip mounting areas 482-485,multiple tests are performed, again with one test chip at a time.

In some embodiments, two or more test chips are tested at a time. Forexample, where the test board 400A provides 32 available pairs of inputand output terminals and 16 test circuits are provided (or to be tested)in each test chip, up to 32 available pairs of input and outputterminals provided by the test board 400A are usable to test two testchips at a time. For example, one test chip is mounted in the chipmounting area 481 and is connected to one set of input and outputterminals, e.g., IN pins 1-16 and OUT pins 1-16 for testing, whereas theother chip is mounted in another chip mounting area, e.g., 482, and isconnected to a different set of input and output terminals, e.g., INpins 17-32 and OUT pins 17-32 for testing. In one or more embodiment,one test chip is connected to more input and output terminals than theother. In one or more embodiment, more than two test chips are tested atthe same time, provided that the test chips are connected to differentsets of input and output terminals.

Another number of input and output terminals and/or another number ofchip mounting areas and/or another number of test chips mounted on thetest board 400A are implemented in various embodiments. The physicalpositions of the chip mounting areas and/or input terminals and/oroutput terminals are variable as well.

FIG. 4B is a schematic diagram of a test board 400B in accordance withsome embodiments. The test board 400B has an electrical arrangementsimilar to that of the test board 400A (FIG. 4A). For simplicity, theelectrical connections to/from the chip mounting areas 482-484 areomitted in FIG. 4B. The omitted electrical connections are similar tothe electrical connections to/from the chip mounting areas 481 and 485.

The test board 400B has, however, a different physical arrangement fromthe test board 400A. For example, the input terminals of the test board400B are grouped into two input areas IN1, and IN2. Likewise, the outputterminals of the test board 400B are grouped into two output areas OUT1,and OUT2. Each of the input areas IN1, IN2 has a corresponding set of 16input conductive patterns, designated as 491A, 491B (or 495A, 495B),leading to each chip mounting area, e.g., 481 (or 485). The inputconductive patterns 491A, 491B (or 495A, 495B) together perform thefunction of the input conductive pattern 481IN (or 485IN) of the testboard 400A. Likewise, each of the output areas OUT1, OUT2 has acorresponding set of 16 output conductive patterns, designated as 491C,491D (or 495C, 495D), leading to each chip mounting area, e.g., 481 (or485). The output conductive patterns 491C, 491D (or 495C, 495D) togetherperform the function of the output conductive pattern 481OUT (or 485OUT)of the test board 400A. The input conductive patterns, e.g., 491A, 495A,outgoing from the same input area, e.g., IN1, are connected to the inputterminals in the input area IN1. Likewise, the output conductivepatterns, e.g., 491D, 495D, coming into the same output area, e.g.,OUT2, are connected to the output terminals in the output area OUT2.

The chip mounting areas 481-485 are distributed at different physicallocations on the test board 400B to permit a determination of thelocation that is most or least likely to fail to be made with a minimalnumber of tests. The test board 400B further includes mounting fixtures,e.g., holes 446, for fixing the test board 400B to testing equipment,e.g., a drop table. For simplicity, one hole 446 is labeled.

The test board 400B is in a state with no chip mounted in the chipmounting areas 481-485. The test board 400B is, in some embodiments,provided as a universal test board which gives the user the flexibilityof selecting a desired test chip to be mounted on a desired location(i.e., chip mounting area) of the test board 400B.

FIG. 5 is a schematic diagram of a test board 500 in accordance withsome embodiments. For simplicity, the individual electrical connectionsto/from the input and output areas IN2 and OUT2 are omitted in FIG. 5.The omitted electrical connections are similar to the electricalconnections to/from the input and output areas IN1 and OUT1.

The input terminals in the input area IN1 include a first set (e.g., INpins 1-8) and a second set (e.g., IN pins 9-16) of input terminals. Theoutput terminals in the output area OUT1 include a first set (e.g., OUTpins 1-8) and a second set (e.g., OUT pins 9-16) of output terminals.The chip mounting areas 581-584 include a first group 581 and 583 and asecond group 582 and 584 of chip mounting areas. The input terminals inthe first set (e.g., IN pins 1-8) are connected to the chip mountingareas 581 and 583 in the first group, by way of corresponding inputconductive patterns 591A and 593A. The output terminals in the first set(e.g., OUT pins 1-8) are connected to the chip mounting areas 581 and583 in the first group, by way of corresponding output conductivepatterns 591C and 593C. The input terminals in the second set (e.g., INpins 9-16) are connected to the chip mounting areas 582 and 584 in thesecond group, by way of corresponding input conductive patterns 592Aand, 594A. The output terminals in the second set (e.g., OUT pins 9-16)are connected to the chip mounting areas 582 and 584 in the secondgroup, by way of corresponding output conductive patterns 592C and 594C.

In some embodiments, the chip mounting areas in the same group areconnected to the same set of input and output terminals. For example,the chip mounting areas 581 and 583 in the same first group areconnected to the same set of input and output terminals IN pins 1-8 andOUT pins 1-8. Further, for each group of chip mounting areas on the testboard 500, one test chip is mounted at a time in a chip mounting area inthe group for testing. In contrast, a different test is performed totest a test chip mounted on a different chip mounting area in the group.For example, for the first group of chip mounting area, one test chip ismounted in the chip mounting area 581, and, a different test isperformed to test a different test chip mounted on the chip mountingarea 583.

In some embodiments, the chip mounting areas in different groups areseparately connected to different sets of input and output terminals.For example, the chip mounting area 581 from the first group and thechip mounting area 582 from the second group are separately connected todifferent sets of input and output terminals. Specifically, the chipmounting area 581 from the first group is connected to the IN pins 1-8and OUT pins 1-8, whereas the chip mounting area 582 from the secondgroup is connected to the IN pins 9-16 and OUT pins 9-16. Further,multiple test chips are mounted in chip mounting areas of differentgroups to be tested at the same time (i.e., in the same test). Forexample, a first test chip is mounted in the chip mounting area 581 ofthe first group and a second test chip is mounted in the chip mountingarea 582 of the second group. The first and second test chips are testedtogether in the same test.

The chip mounting areas 581-584 are distributed at different physicallocations on the test board 500 to determine the location that ismost/least likely to fail to be made with a minimal number of tests. Thetest board 500 further includes mounting fixtures, e.g., holes 546, forfixing the test board 500 to testing equipment, e.g., a drop table. Forsimplicity, one hole 546 is labeled. The test board 500 is in a statewith no chip mounted in the chip mounting areas 581-584. The test board500 is, in some embodiments, provided as a universal test board whichgives the user the flexibility of selecting a desired test chip to bemounted on a desired chip mounting area of the test board 500. Anynumber of sets of input and output terminals and/or any number of inputor output terminals in each set and/or any number of groups of chipmounting areas and/or any number of chip mounting areas in each groupand/or any number of test chips mounted on the test board 500 areimplemented in various embodiments.

FIG. 6 is a flow chart of a method 600 in accordance with someembodiments. At step 631, a test chip is prepared having at least a Sidevice and metallization layers over the Si device. For example,metallization layers 272 in FIG. 2 are over Si device 271.

At step 633, a plurality of test circuits are formed in the test chip.At least one of the test circuits extends through at least two layers ofthe metallization layers, e.g., as described with respect to FIG. 2.

At step 635, the test chip is bonded on the test board, e.g., by bumps275 (FIG. 2). The multiple test circuits of the test chip are connectedto input and output terminals on the test board, e.g., by way ofmultiple input and output conductive patterns as described with respectto FIGS. 3A-3B, 4A-4B and 5.

At step 637, the bonded test chip and the test board are subjected to areliability test, e.g., a drop test as described with respect to FIG. 1.Other reliability tests for checking reliability of a chip areimplemented in accordance with one or more embodiments. Such other testsinclude, but are not limited to, temperature cycling tests, vibrationtests, and humidity cycling tests. In some embodiments, reliabilitytests designed for the ICs in other applications and/or industries,including devices other than handheld devices, are performed at step637.

The above method embodiment shows exemplary steps, but the steps are notnecessarily required to be performed in the order shown. Steps may beadded, replaced, changed order, and/or eliminated as appropriate, inaccordance with the spirit and scope of embodiments of the disclosure.For example, in some embodiments, one or more of steps 631, 633 is/areomitted.

Embodiments that combine different features and/or different embodimentsare within scope of the disclosure and will be apparent to those ofordinary skill in the art after reviewing this disclosure.

An aspect of this description relates to a chip reliability testingmethod. The method includes mounting a first test chip on a test board,wherein the first test chip comprises a silicon device having aplurality of metallization layers configured to establish a plurality oftest circuits, a conductive redistribution layer contacting at least oneof the plurality of metallization layers, and contact pads on exposedportions of the conductive redistribution layer. The mounting includesbonding the contact pads of the first test chip to corresponding contactpads of the test board. The method further includes applying a testvoltage to a first contact pad connected to a first test circuit of theplurality of test circuits and, while maintaining the test voltage,subjecting the first test circuit to a reliability test. The methodfurther includes monitoring an output voltage at a second contact padconnected to the first test circuit during a test period encompassingpredetermined portions of the reliability test. In some embodiments,subjecting the first test circuit to the reliability test comprisessubjecting the first test circuit to a drop test. In some embodiments,the method further includes determining that the test chip has failedthe reliability test in response to the output voltage being below athreshold for a predetermined duration. In some embodiments, bonding thecontact pads of the test chip to the corresponding contact pads of thetest board includes reflowing solder bumps. In some embodiments, themethod further includes mounting a second test chip on the test board,wherein the second test chip is different from the first test chip. Insome embodiments, mounting the second test chip includes electricallyconnecting an input terminal of the second test chip to an inputterminal of the first test chip. In some embodiments, mounting the firsttest chip includes electrically connecting an input terminal of thefirst test chip to a first input terminal of the test board, andmounting the second test chip includes electrically connecting an inputterminal of the second test chip to a second input terminal of the testboard different from the first input terminal of the test board. In someembodiments, mounting the second test chip includes mounting the secondtest chip spaced from the first test chip in one direction parallel to atop surface of the test board. In some embodiments, mounting the secondtest chip includes mounting the second test chip spaced from the firsttest chip in two directions parallel to a top surface of the test board.

An aspect of this description relates to a chip reliability testingapparatus. The apparatus includes a test board. The test board includesa plurality of test chip mounting areas, wherein each of the pluralityof test chip mounting areas comprises plurality of contact pads forelectrically connecting to a corresponding test chip. The test boardfurther includes a first input region, wherein the first input regionincludes a plurality of first input terminals, each of the plurality offirst input terminals is configured to receive a test voltage and eachof the plurality of first input terminals is electrically connected toat least one corresponding test chip mounting area of the plurality oftest chip mounting areas. The test board further includes a first outputregion, wherein the first output region includes a plurality of firstoutput terminals, each of the plurality of first output terminals iselectrically connected to at least one corresponding test chip mountingarea of the plurality of test chip mounting areas, and each of theplurality of first output terminals is configured to receive an outputvoltage from a test chip mounted at the at least one corresponding testchip mounting area. The apparatus further includes a drop table forsupporting the test board, wherein the drop table is configured toimplement a reliability drop test for test chips mounted to theplurality of test chip mounting areas. In some embodiments, the testboard further includes a plurality of holes for mounting to the droptable. In some embodiments, each of the plurality of first inputterminals is electrically connected each of the plurality of test chipmounting areas. In some embodiments, each of the plurality of firstoutput terminals is electrically connected each of the plurality of testchip mounting areas. In some embodiments, the test board furtherincludes a second input region, wherein the first second region includesa plurality of second input terminals, each of the plurality of secondinput terminals is configured to receive a test voltage and each of theplurality of second input terminals is electrically connected to atleast one corresponding test chip mounting area of the plurality of testchip mounting areas. In some embodiments, at least one of the pluralityof first input terminals is electrically connected to a same test chipmounting area as at least one of the plurality of second inputterminals. In some embodiments, the test board further includes a secondoutput region, wherein the second output region includes a plurality ofsecond output terminals, each of the plurality of second outputterminals is electrically connected to at least one corresponding testchip mounting area of the plurality of test chip mounting areas, andeach of the plurality of second output terminals is configured toreceive an output voltage from a test chip mounted at the at least onecorresponding test chip mounting area. In some embodiments at least oneof the plurality of first input terminals is electrically connected to asame test chip mounting area as at least one of the plurality of secondinput terminals. In some embodiments, a first test chip mounting area ofthe plurality of test chip mounting areas is spaced from a second testchip mounting area of the plurality of test chip mounting areas in onedirection parallel to a top surface of the test board. In someembodiments, a first test chip mounting area of the plurality of testchip mounting areas is spaced from a second test chip mounting area ofthe plurality of test chip mounting areas in two directions parallel toa top surface of the test board.

An aspect of this description relates to a chip reliability testingmethod. The method includes mounting a first test chip on a test board,wherein the first test chip comprises a silicon device having aplurality of metallization layers configured to establish a plurality oftest circuits, a conductive redistribution layer contacting at least oneof the plurality of metallization layers, and contact pads on exposedportions of the conductive redistribution layer. The mounting includesbonding the contact pads of the first test chip to corresponding contactpads of the test board. The method further includes applying a testvoltage to a first contact pad connected to a first test circuit of theplurality of test circuits. The method further includes performing adrop test while applying the test voltage. The method further includesmeasuring an output voltage at a second contact pad connected to thefirst test circuit during the drop test. The method further includesdetermining whether the first test circuit passes the drop test based onwhether the output voltage is below a threshold for a predeterminedduration.

It will be readily seen by one of ordinary skill in the art that one ormore of the disclosed embodiments fulfill one or more of the advantagesset forth above. After reading the foregoing specification, one ofordinary skill will be able to affect various changes, substitutions ofequivalents and various other embodiments as broadly disclosed herein.It is therefore intended that the protection granted hereon be limitedonly by the definition contained in the appended claims and equivalentsthereof.

What is claimed is:
 1. A chip reliability testing method, comprising:mounting a first test chip on a test board, wherein the first test chipcomprises a silicon device having a plurality of metallization layersconfigured to establish a plurality of test circuits, a conductiveredistribution layer contacting at least one of the plurality ofmetallization layers, and contact pads on exposed portions of theconductive redistribution layer, and the mounting includes: bonding thecontact pads of the first test chip to corresponding contact pads of thetest board; applying a test voltage to a first contact pad connected toa first test circuit of the plurality of test circuits and, whilemaintaining the test voltage, subjecting the first test circuit to areliability test; and monitoring an output voltage at a second contactpad connected to the first test circuit during a test periodencompassing predetermined portions of the reliability test.
 2. Themethod of claim 1, wherein subjecting the first test circuit to thereliability test comprises subjecting the first test circuit to a droptest.
 3. The method of claim 1, further comprising determining that thefirst test chip has failed the reliability test in response to theoutput voltage being below a threshold for a predetermined duration. 4.The method of claim 1, wherein bonding the contact pads of the firsttest chip to the corresponding contact pads of the test board comprisesreflowing solder bumps.
 5. The method of claim 1, further comprisingmounting a second test chip on the test board, wherein the second testchip is different from the first test chip.
 6. The method of claim 5,wherein mounting the second test chip comprises electrically connectingan input terminal of the second test chip to an input terminal of thefirst test chip.
 7. The method of claim 5, wherein mounting the firsttest chip comprises electrically connecting an input terminal of thefirst test chip to a first input terminal of the test board, andmounting the second test chip comprises electrically connecting an inputterminal of the second test chip to a second input terminal of the testboard different from the first input terminal of the test board.
 8. Themethod of claim 5, wherein mounting the second test chip comprisesmounting the second test chip spaced from the first test chip in onedirection parallel to a top surface of the test board.
 9. The method ofclaim 5, wherein mounting the second test chip comprises mounting thesecond test chip spaced from the first test chip in two directionsparallel to a top surface of the test board.
 10. A chip reliabilitytesting apparatus, comprising: a test board, wherein the test boardcomprises: a plurality of test chip mounting areas, wherein each of theplurality of test chip mounting areas comprises plurality of contactpads for electrically connecting to a corresponding test chip; a firstinput region, wherein the first input region comprises a plurality offirst input terminals, each of the plurality of first input terminals isconfigured to receive a test voltage and each of the plurality of firstinput terminals is electrically connected to at least one correspondingtest chip mounting area of the plurality of test chip mounting areas bya plurality of conductive patterns; a first output region, wherein thefirst output region comprises a plurality of first output terminals,each of the plurality of first output terminals is electricallyconnected to at least one corresponding test chip mounting area of theplurality of test chip mounting areas, and each of the plurality offirst output terminals is configured to receive an output voltage from atest chip mounted at the at least one corresponding test chip mountingarea; and a drop table for supporting the test board, wherein the droptable is configured to implement a reliability drop test for test chipsmounted to the plurality of test chip mounting areas.
 11. The apparatusof claim 10, wherein the test board comprises a plurality of holes formounting to the drop table.
 12. The apparatus of claim 10, wherein eachof the plurality of first input terminals is electrically connected eachof the plurality of test chip mounting areas.
 13. The apparatus of claim10, wherein each of the plurality of first output terminals iselectrically connected each of the plurality of test chip mountingareas.
 14. The apparatus of claim 10, wherein the test board furthercomprises a second input region, wherein the second input regioncomprises a plurality of second input terminals, each of the pluralityof second input terminals is configured to receive a test voltage andeach of the plurality of second input terminals is electricallyconnected to at least one corresponding test chip mounting area of theplurality of test chip mounting areas.
 15. The apparatus of claim 14,wherein at least one of the plurality of first input terminals iselectrically connected to a same test chip mounting area as at least oneof the plurality of second input terminals.
 16. The apparatus of claim10, wherein the test board further comprises a second output region,wherein the second output region comprises a plurality of second outputterminals, each of the plurality of second output terminals iselectrically connected to at least one corresponding test chip mountingarea of the plurality of test chip mounting areas, and each of theplurality of second output terminals is configured to receive an outputvoltage from a test chip mounted at the at least one corresponding testchip mounting area.
 17. The apparatus of claim 16, wherein at least oneof the plurality of first input terminals is electrically connected to asame test chip mounting area as at least one of the plurality of secondinput terminals.
 18. The apparatus of claim 10, wherein a first testchip mounting area of the plurality of test chip mounting areas isspaced from a second test chip mounting area of the plurality of testchip mounting areas in one direction parallel to a top surface of thetest board.
 19. The apparatus of claim 10, wherein a first test chipmounting area of the plurality of test chip mounting areas is spacedfrom a second test chip mounting area of the plurality of test chipmounting areas in two directions parallel to a top surface of the testboard.
 20. A chip reliability testing method, comprising: mounting afirst test chip on a test board, wherein the first test chip comprises asilicon device having a plurality of metallization layers configured toestablish a plurality of test circuits, a conductive redistributionlayer contacting at least one of the plurality of metallization layers,and contact pads on exposed portions of the conductive redistributionlayer, and the mounting includes: bonding the contact pads of the firsttest chip to corresponding contact pads of the test board; applying atest voltage to a first contact pad connected to a first test circuit ofthe plurality of test circuits; performing a drop test while applyingthe test voltage; measuring an output voltage at a second contact padconnected to the first test circuit during the drop test; anddetermining whether the first test circuit passes the drop test based onwhether the output voltage is below a threshold for a predeterminedduration.